Description

0190-30354 AMAT

产品概述

0190-30354是Applied Materials生产的Producer GT UV Chamber，用于半导体制造过程中的光刻工艺。该腔室可提供高强度的紫外光，用于将光刻胶图案化到晶圆上。

产品参数

型号：0190-30354

光源：汞灯

波长：254 nm

曝光面积：300 mm x 300 mm

曝光均匀性：±5%

曝光速度：可调节

真空度：<10-6 Torr

工作温度：20°C至120°C

外形尺寸：1000 mm x 1000 mm x 1500 mm

产品应用

0190-30354 Producer GT UV Chamber可用于各种半导体制造工艺，包括：

光刻

代工

LED制造

太阳能电池制造

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